EDX Analysis · Multiscale Bayesian Modeling · Chemical Mapping
Energy-dispersive x-ray (EDX) data, multiscale modeling, robust unmixing.
Energy dispersive X-ray (EDX) spectrum imaging yields compositional information with a spatial resolution down to the atomic level. However, experimental limitations often produce extremely sparse and noisy EDX spectra. The methodology leverages Poisson statistics in the EDX data and their underlying spatial correlations, combined with spectral simulation for Bayesian estimation. Results indicate the approach produces more accurate chemical maps with higher spatial resolution than those obtained by standard methods, with applications to experimental datasets including ferroelectric domain mapping.